Silicon Carbide High Temperature Oxidation Furnace

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Silicon Carbide High Temperature Oxidation Furnace


This is a specialised equipment for the high temperature oxidation process of Silicon Carbide (SiC) discs. This equipment is capable of oxidising SiC materials at high temperatures to meet specific process requirements. In addition to the high temperature oxidation of SiC wafers, the machine can also be used for the oxidation of conventional silicon wafers.