Practical Guide to Troubleshooting and Maintenance of Purification Furnaces
Release time:
2026-01-05
Author:
Source:
Abstract
1. Failure to reach or unstable temperature
☞ Check if the power supply voltage is normal and if there are any controller alarms.
☞ Measure the resistance of heating elements after powering off to determine if they are broken or aged.
☞ Compare readings with a spare thermocouple to calibrate or replace a faulty one.
☞ Check if the three-phase heating current is balanced; excessive deviation requires adjustment.
2.Poor vacuum or slow pumping speed
☞ First, check the vacuum pump: Is the oil dirty? Is the oil level correct? Are there any abnormal running sounds?
☞ Clean and inspect all sealing rings; replace any that are damaged or deformed immediately.
☞ Perform segmented leak detection: Close the main valve and pump down the piping only. If good vacuum is achieved, the leak is in the furnace body. If vacuum is still poor, the problem is with the ☞ pump or the piping itself.
3.Product contamination
☞ Verify that the purity of the protective gas meets standards and that the gas lines are clean and dry.
☞ Before each production run, it is essential to perform a high-temperature "baking" or empty furnace run to remove impurities inside the furnace.
☞ Ensure that materials in contact with the charge, such as crucibles or boats, are of suitable composition and are thoroughly cleaned before use.
☞ In case of contamination, run a complete process cycle with an empty furnace and sample the atmosphere to establish a contamination baseline.
4.Cooling abnormalities
☞ Check if the cooling water pressure and flow rate meet requirements; clean potentially clogged water lines.
☞ Ensure that air-cooling fans are operating normally without unusual noise.
☞ Remove dust accumulation from the furnace shell's heat dissipation fins to guarantee cooling efficiency.
5.Key points for preventive maintenance
☞ Maintain proper records for operation, faults, and spare parts replacement.
☞ Treat vacuum pump oil, sealing rings, and heating elements as consumables and replace them strictly according to the schedule.
☞ Test furnace temperature uniformity monthly, and test the vacuum system's ultimate vacuum and pumping speed quarterly.
☞ Establish a minimum stock of critical spare parts to ensure prompt replacement in case of sudden failure.
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2026-01-21
Zhuzhou Chi Carbon Automation Equipment Co., Ltd
1
Email:13077017815@163.com
chitanauto@163.com
Adresse:
Building 4, Phase 2.5, Independent Entrepreneurship Park, Tianyi Science and Technology City, Tianyuan District, Zhuzhou City, Hunan Province, China
Mr. Gong +86 13975355803
